Underneath The Arches - Volume 1

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Maureen Cullen, Lucy Ingrams, Katie Griffiths and Geraldine Clarkson

Access provided by: anon Sign Out. Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation Abstract: We present an investigation of the nonlinear dynamics of clamped-clamped micromachined arches when actuated by a dc electrostatic load superimposed on an ac harmonic load.

The Galerkin method is used to discretize the distributed-parameter model of a shallow arch to obtain a reduced-order model. The static response of the arch due to a dc load actuation is simulated, and the results are validated by comparing them to experimental data.

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The dynamic response of the arch to a combined dc load and ac harmonic load is studied when excited near its fundamental natural frequency, twice its fundamental natural frequency, and near other higher harmonic modes. The results show a variety of interesting nonlinear phenomena, such as hysteresis, softening behavior, dynamic snap-through, and dynamic pull-in.


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Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation - IEEE Journals & Magazine

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Underneath The Arches

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